Particle-in-cell coupled with Monte-Carlo Collisions and external circuitry for low temperature plasma reactors

Authors

Richard Lombardini, St. Mary's University

Files

Publication Date

Spring 2025

Department

Physics

Description

Low-temperature plasma reactors used for chip fabrication involve complex physical processes that affect the quality of pattern transfer on the semiconductor substrate. Detailed investigations of the near-surface plasma environment require fully-kinetic approaches. We use a particle-in-cell/Monte Carlo collision (PIC/MCC) approach coupled with external circuitry to model realistic operating conditions capture the kinetic effects and measure ion energy and angle distribution functions. We build on the exascale-capable PIC/MCC code, WarpX, and leverage Python interfaces to couple external circuitry. In this talk, we will demonstrate this inexpensive, non-iterative coupled strategy using a two-dimensional Gaseous Electronics Conference reference cell.

Keywords

Plasma reactors, Chips, Semiconductors; Monte Carlo Collision

Digital Publisher

Digital Commons at St. Mary's University

Collection

Research Showcase Presentations -2025

Format

pdf

Medium

Presentation

City

San Antonio, Texas

Creative Commons License

This work is licensed under a Creative Commons Attribution-NonCommercial-No Derivative Works 4.0 International License.